Syed Muhammad Zaki Syed Ahmad

Process Engineer in the Lithography department for process and equipment start-up for the Pelican Project.

• Assignment for 3 months at New Mexico F11, for learning and knowledge transfer.
• Tool Install and qualification for Nikon S210D reuse tool transfer, involving design verification based references package to ensure smooth transfer.
• Analyze tool condition and essential parts to rejuvenate the tool, working in parallel with Nikon supplier and US counterpart.
• Manage chemical readiness and forecasting for whole department on Solvent, Resist, Cleaning solution, grease, oil, AC gas scanner, Krf gaseous, and Arf Gaseous.
• Manage general item involve space and capacity for storage of tools parts (cages,cabinets,chain,lock,fridge.etc)
• Manage Data center together with IT team (workstation) for server allocation nikon,gigaphoton,cymer and cannon.

• Lead for Metal and of Via layer for AL and Cu BEOL
• Process Tool owner for ASML Scanner DUV/ILINE PAS5500 version and TEL Track Act 8 for recipe creation and tuning.
• Sustaining, maintaining and controlling process involving 8D problem solving method, 6 Sigma (DMAIC) to improve processing criteria and Line issue.
• Project ownership, inter-via qualification for DUV and Arf scanner, for flexibility, cycle time, and mass production activity.
• Project ownership for C13 High Voltage Metal 1 process optimization. To improve metal process margin issue.
• Project ownership for PAD(Passivation) and Inductor (Thick Top Metal) layer qualification on DUV tool (PAS5500 ASML)
• To ensure manufacturing flexibility and further improve cycle time.
• Project owner on new Resist qualification for Metal, Reduce cost and increase process margin with extra PR remain for etching process margin improvement.
• Project Ownership for Metal ArF, for major capacity upgrade, for fast cycle time required to maintain healthy WIP throughput.